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发明名称
MANUFACTURE OF AMORPHOUS SILICON GERMANIUM THIN FILM
摘要
申请公布号
JPS6273624(A)
申请公布日期
1987.04.04
申请号
JP19850213422
申请日期
1985.09.26
申请人
SUMITOMO ELECTRIC IND LTD
发明人
ISHII MASAYUKI;ITOZAKI HIDEO;FUJITA NOBUHIKO;ICHIYANAGI HAJIME
分类号
H01L31/04;H01L21/205
主分类号
H01L31/04
代理机构
代理人
主权项
地址
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