APPARATUS FOR FORMING THIN METALLIC FILM,申请号JP19850184413-传众专利搜索

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发明名称	APPARATUS FOR FORMING THIN METALLIC FILM
摘要
申请公布号	JPS6244569(A)	申请公布日期	1987.02.26
申请号	JP19850184413	申请日期	1985.08.20
申请人	MITSUBISHI ELECTRIC CORP	发明人	ARIMA JUNICHI
分类号	C23C14/34;C23C14/50;H01L21/203;H01L21/285	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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