| 摘要 |
PURPOSE:To make small the equivalent serial resistance, to make high the sensitivity, to make wide a vacuum degree measuring scope, to make small-sized and to make light by arranging the exciting electrode at both edge parts and the central part of the vibrator. CONSTITUTION:For a piezoelectric vibrator 1, the supporting pat 3 is fixed by adhesives 4, etc., on a supporting base 2 composed of a ceramics material, etc. The exciting electrode is arranged on the four surfaces of respective arms, the number of electrodes is three pieces each on respective surfaces and arranged so that the adjoining electrode can be the different electrode. Namely, at one side arm, electrodes 5, 6, 7, 8, 9 and 10 and electrodes, which respectively go to be the same electrodes to these facing surfaces, are arranged, for example, electrodes 6, 8, and 10 and electrodes 5, 7 and 9 are connected so that respective electrodes can be the same electrodes. Electrodes 11, 12, 13, 14, 15, 16, etc., of other arm are in the same manner, and the polarity is made opposite. Thus, by making easy the both edge fixing bending mode the third higher harmonic vibration is made easy, thereby the equivalent serial resistance can be made smaller. |
