CHEMICAL VAPOUR DESPOSITION,申请号GB19860016989-传众专利搜索

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发明名称	CHEMICAL VAPOUR DESPOSITION
摘要
申请公布号	GB8616989(D0)	申请公布日期	1986.08.20
申请号	GB19860016989	申请日期	1986.07.11
申请人	UNVALA LTD	发明人
分类号	H01L21/205;C23C14/22;C23C16/448;C30B25/02;(IPC1-7):C23C16/44	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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