| 摘要 |
PURPOSE:To increase the utilizing efficiency of laser beam by providing oppositely at least one couple of reflecting mirrors which reflect multiply the laser beam being made incident from an incident port in the inside of a reaction chamber having the incident port of laser beam. CONSTITUTION:The laser beam 11 generated in a laser oscillator 1 is introduced into the inside of the reaction chamber 2 through the incident port 5 of laser beam and reflected by a reflecting mirror 13. The reflected laser beam 11 is rereflected by a reflecting mirror 14 provided to the reflecting side of the reflecting mirror 13. While the laser beam introduced from one side of the reaction chamber 2 is reflected in the chamber 2 by this repeat, it reaches the outlet 6 of laser beam diagonal to the incident port 5. Therefor the optical path of laser beam in the chamber 2 is made long and the excitation of the reaction gas is efficiently performed by the increase of the collision against a reaction vessel in the reaction chamber or the increase of contact time. |
