SEMICONDUCTOR CRYSTAL PULLING DEVICE

摘要

PURPOSE:To obtain the titled pulling device capable of controlling accurately the position of melt surface on the basis of the position itself of the melt surface by consisting the pulling device so that the reflected light of the projected light due to the melt surface in a crucible is received with a photodetector and the position of the melt surface is measured from the change of a projection optical path or a reflection optical path. CONSTITUTION:In a semiconductor crystal pulling device by a Czochralski process in which the semiconductor raw material is put in a quartz crucible 7 built in a graphite crucible 6 in a heating chamber 1 and heated with a heater 8 and a crystal ingot is grown from the obtained melt 9 by means of a pulling driven part 3 provided to a pulling chamber 2, the reflected light 15B of the protected light 15A from a luminescent source 10 of a laser oscillator or the like due to the melt surface 9a in the above-mentioned crucible 7 is received with an image sensor 17 consisting of the arranged many photodetectors. The photodetectors received with light are detected with a photoreception position detector 22 and furthermore the position of the above-mentioned melt surface 9a is measured with a measuring apparatus 24 of the position of melt surface. An elevating motor 4 is controlled by a motor controller 27 to ascent and descend the crucible 7 so that the measured position and the preset value out of a melt surface setter 25 are compared with a comparator 26 and the variance is regulated to zero.