| 摘要 |
PURPOSE:To remove impurities effectively and to obtain water having ultrahigh purity by impressing voltage on water to be treated in a process for prepg. ultrapure water by ion-exchange and reverse osmosis or ultrafiltration, and ionizing or polarizing even finest impurities in the water to be treated. CONSTITUTION:Impurities in the water to be treated including extremely fine particles are ionized or polarized forcibly and enlarged by combining the impurities with each other by impressing a voltage on the water to be treated charged from a suction port 1 in an electrode device 11. Enlarged impurities are adsorbed and removed by an active carbon filter 2, an ion exchange device 3, a high performance ion exchange device 4, and a reverse osmotic membrane 5. The electrode device 11 may be installed as a prestage treating device for the ion exchange device, 3, high performance ion exchange device 4, and a reverse osmotic membrane 5.
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