| 摘要 |
PURPOSE:To prevent the generation of an airflow and to make an installation small in size, by providing a magnetic fluid seal at the inlet and outlet of a film of a vacuum processing chamber so as to close a film-passing port in a liquid- proof manner. CONSTITUTION:Seal casings 7 and 8 are disposed outside a film inlet 5 and a film outlet 6 provided in a vacuum processing chamber 1, respectively. Moreover, pole pieces 13 and 14 are provided if front and rear of a front permanent magnet 11 and a rear permanent magnet 12 provided inside the seal casings 7 and 8, respectively. O rings 9 and 10 are fitted in the grooves formed in the outer peripheries of the pole pieces 13 and 14 so that the insides of the casings 7 and 8 the outsides of the pole pieces 13 and 14 can be kept airtight between them. Magnetic liquid 15 and 16 are disposed respectively in spaces which are provided through the centers of the magnets 11 and 12 and the pole pieces 13 and 14 and through which a film a is passed, and these magnetic liquids are retained by the magentic fields of the magnets 11 and 12 and the pole pieces 13 and 14 respectively. By this constitution, the film A is subjected to vacuum processing continuously without being imapaired by an airflow.
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