| 摘要 |
PURPOSE:To treat the surface of a resin with plasma by stabilized microwave discharge without damaging a treating gas introduction system, by preexciting a plasma treating gas just before the treating gas is fed to a strong electric field zone by microwave. CONSTITUTION:In plasma treatment by microwave discharge plasma, a material to be treated such as synthetic resin material, etc. is put in the treating container 1 forming strong electric field zone by microwave, the container 1 is evacuated. Just before the gas valve 10 is opened, and a plasma treating gas (e.g., oxygen gas, etc.) in the bomb 9 is fed to the zone, the treating gas is preexcited in the plasma generating tube 8 by high-voltage discharge from the Tesla coil 18. While the microwave produced by the microwave generator 2 is transmitted through the waveguide 6 to the generating furnace 7, the treating gas is made into plasma using electrons formed by the preexciting as a trigger, diffused through the connector 14 from the shower pipe 16 into the treating container 1, and the material to be treated is subjected to plasma treatment.
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