| 摘要 |
PURPOSE:To display an image without missing and not impairing the general feature of a sample image by displaying even the picture element corresponding to the point not illuminated by a charged particle beam using the picture element data near this point when displaying a sample image in a short time. CONSTITUTION:A control signal is fed to a deflecting circuit 7 from a computer 6 and an electron beam 3 is illuminated to illumination points corresponding to picture elements at intervals of N elements to scan a sample 5. The detection signal obtained in conjunction with the illumination of this electron beam 3 is stored in the address corresponding to each picture element of a data storage memory 10 through a detector 8 and an AD converter 9. Next, adjacent picture element data among collected picture element data are transferred and stored in each address of the memory 10 corresponding to each picture element not illuminated with the electron beam to interporate the data. Then, the display data of all picture elements are read out of the memory 10 under the control of the computer 6 and fed to a CRT 11 to display the image of the sample 5. |
