| 摘要 |
PURPOSE:To obtain a simple and compact mass spectrometer that is suitable for use in a nuclear fusion device and such by providing a means that applies a magnetic field in parallel to the axial center of the hollow section of an anode and applying higher potential than that of first and third cathodes, to a second cathode. CONSTITUTION:Negative potential is applied to a second cathode 7 by a power supply 17 and much lower potential than that of the second cathode 7 is applied to a first cathode 5 by the power supplies 17 and 18 and to a third cathode 9 by the power supplies 17 and 19, respectively. A high temperature and density electron group is confined in the hollow section of an anode 3 and ionizes gas molecules. The ionized molecules move in the hollow section of the anode 3 by the force received from an electromagnetic field and a part of them hits the surface of a sample 10 in high energy by the potential difference applies to a third cathode 9. Since a sufficient amount of primary ions that are incident on the surface of the sample are obtained by low operation gas pressure and since the amount of the surface material sputtered from the sample surface is large, a differential exhaust system and such for the radiation of the primary ions are not required. |
