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发明名称
摘要
申请公布号
JPH0612810(B2)
申请公布日期
1994.02.16
申请号
JP19870199110
申请日期
1987.08.11
申请人
NIPPON ELECTRIC CO
发明人
TOOYAMA SHIGERU
分类号
G01J1/44;G01J5/48;H01L27/14;H01L27/146;H01L31/108;H04N5/33;H04N5/335;H04N5/355;H04N5/357;H04N5/369;H04N5/374;(IPC1-7):H01L27/146
主分类号
G01J1/44
代理机构
代理人
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