| 摘要 |
PROBLEM TO BE SOLVED: To place a wafer cassette on a wafer cassette elevator without projecting a wafer from a wafer cassette by a method wherein the wafer is set vertically, etc., when the wafer cassette is placed on a table of the wafer cassette elevator. SOLUTION: A board 5 provided in a support arm 26 of a wafer cassette elevator, a bearing 7 fitted to the board 5; and a pivotal axis 9 fitted with a pinion 11 at the axial end and fitted to the bearing 7 are provided in a wafer cassette elevator lifting up and down with a wafer cassette 17 mounted. Further, this device comprises a table 10 fitted to the pivotal axis 9, a plate 13 fitted vertically to the table 10, and a rack 14 fixed to a machine casing 1 of the wafer cassette elevator to engage with the pinion 11. For example, when the table 10 is dropped, the pinion 11 is engaged with the rack 14, the table 10 and the plate 13 are integrally pivoted clockwise to align the plate 13 horizontally. |
