发明名称 TESTING DEVICE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PURPOSE:To utilize an idle time between regular, tests, and to efficiently execute a self-test and calibration, by stopping an operation of an incorporated self-testing device, immediately before a testing element is connected to an adaptor for connecting an element to be tested. CONSTITUTION:To a testing signal generating and discriminating device 11, an element 13 to be tested is connected through an adaptor 12. The adaptor 12 is provided with a connection previous notice signal generating means, and in case of a regular device mode in which the element 13 is connected to the adaptor 12, a self-testing device 14 is stopped. In a state that a device test has ended and the adaptor 12 has been detached, the device 14 starts is operation as necessary, and the test and calibration regarding the device 11 and the adaptor 12 are executed. Subsequently, when the adaptor 12 is made to approach the element 13 and a connection previous notice signal is sent out to the device 14, the operation of the device 14 is stopped.
申请公布号 JPS5852579(A) 申请公布日期 1983.03.28
申请号 JP19810150970 申请日期 1981.09.24
申请人 NIPPON DENKI KK 发明人 ISHIGURO HIDEO
分类号 G01R31/28;G06F11/22;H01L21/66 主分类号 G01R31/28
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