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发明名称
摘要
申请公布号
JPS5827936(U)
申请公布日期
1983.02.23
申请号
JP19810121961U
申请日期
1981.08.18
申请人
发明人
分类号
H01L29/41;H01L21/331;H01L21/60;H01L29/72;H01L29/73;(IPC1-7):H01L21/60;H01L29/44
主分类号
H01L29/41
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代理人
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