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发明名称
SOLUTION FOR DIMENSIONAL ETCHING
摘要
申请公布号
SU990872(A1)
申请公布日期
1983.01.23
申请号
SU19813369001
申请日期
1981.09.23
申请人
GORDINA LYUBOV S,SU;YAKUNINA ELENA V,SU;ORLOVA NATALIYA V,SU
发明人
GORDINA LYUBOV S,SU;YAKUNINA ELENA V,SU;ORLOVA NATALIYA V,SU
分类号
C23F1/02;C23F1/28;(IPC1-7):23F1/02
主分类号
C23F1/02
代理机构
代理人
主权项
地址
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