| 摘要 |
PURPOSE:To produce inexpensively an optical waveguide film having a large area, by using the colloidal solution of fine glass particles as starting raw materials and using the liquid phase technique to form a glass optical waveguide film. CONSTITUTION:When a substrate 1 immersed in a colloidal solution 3 of fine glass particles is drawn up by a drawing-up device 4, a solution layer having a uniform thickness is formed on the substrate of the substrate 1. A substrate 1' with the solution layer stuck is put in a vacuum vessel 5, and air in the vessel is discharged from an air discharge exit 6 by a vacuum pump, and simultaneously, the substrate 1' is heated to about 100 deg.C by a heater 7 to remove the solvent other than fine glass particles from the solution layer, and thus, a fine glass particle layer is formed on the substrate. A substrate 1'' with the fine galss particle layer stuck is put in an electric furnace 8, and the temperature in the furnace is raised to remove bubbles and impurities in the fine glass particle layer while supplying a gaseous mixture from a gas supply entrance 9, thus forming a transparent glass optical waveguide film. |
