Improved integrated sputtering apparatus and method,申请号GB19820009499-传众专利搜索

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发明名称	Improved integrated sputtering apparatus and method
摘要
申请公布号	GB2096177(A)	申请公布日期	1982.10.13
申请号	GB19820009499	申请日期	1982.03.31
申请人	FOURNIER PAUL R	发明人
分类号	H01J37/34;(IPC1-7):C23C15/00	主分类号	H01J37/34
代理机构		代理人
主权项
地址

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