| 摘要 |
PURPOSE:To enable the setting of the position in the direction of the height of a specimen to be analyzed by providing a focus adjusting variable resistor for viewing the image and a focusing variable resistor for X-ray analysis switchably to a power source for exciting the objective lens. CONSTITUTION:A power source 5 for exciting an objective lens 4 for focusing an electron beam 1 is provided with variable resistors 6, 7 for setting the output current such that they can be selected by an exchanging switch 8. In other word when viewing a scan electron microscopic image, the focus distance is varied freely by a variable resistor 6 while when performing the X-ray analysis the focus position of the objective lens 4 is set at the position (A) on a specimen by a semi-fixed variable resistor 7 thereby the height of the specimen 3 is regulated to set the position (A) thus to perform the focusing. Consenquently the setting of the position in the direction of the height of the specimen can be performed easily and accurately by adding a simple circuitry. |
