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经营范围
发明名称
FLATNESS MEASURING DEVICE
摘要
申请公布号
GB2083229(A)
申请公布日期
1982.03.17
申请号
GB19810025612
申请日期
1981.08.21
申请人
HITACHI LTD
发明人
分类号
G01B5/28;G01B7/34;G01B11/30;G01B21/30;H01L21/66;(IPC1-7):G01B7/34;G01B7/14
主分类号
G01B5/28
代理机构
代理人
主权项
地址
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