| 摘要 |
PURPOSE:To perform uniform noncontacting working of a work having uneven surface with irradiating the laser beams by detecting and storing optimum focal position, by arranging the light source for observation between the condensing optical systems which condense and irradiate the layer beams onto the work. CONSTITUTION:A parallel light beams from a light source 8 are reflected by a mirror 9 and a made incident to a condencing lens 3 through a half mirror 10, a dichroic mirror 2 to focus in the vicinity of the surface of the work. The converged beam scattered on the surface of the work 6 being moved by a table 7 is reflected by a half-mirror 10 to reach a detecting means 12 through a focusing lens 11, while the collecter lens 3 moves back and forth by a moving means 4, the point at which the pattern of the scattered beams become minimum is found by the detecting means 12 and the extent of the movement at this time is stored together with the position of the table. Thus, after correcting the shift of condensed point due to the difference between the oscillating wavelength of the laser beams 1 and that of the light source 8, the laser beams are discharged and the laser working is performed at the optimum focal position. |
