发明名称 |
Semiconductor strain gauge with elastic load plate |
摘要 |
A semiconductor substrate has a major surface, another major surface on the opposite side of the first major surface, a strain gauge stripe formed in the central portion of the second major surface by diffusing an impurity therein, and electrodes connected to the strain gauge stripes. These strain gauge stripes are spaced from the peripheral edge of the second major surface by a distance greater than 1/3 of the length of the same major surface. The first major surface of the semiconductor substrate is bonded to an elastic metal load plate.
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申请公布号 |
US4292618(A) |
申请公布日期 |
1981.09.29 |
申请号 |
US19800129195 |
申请日期 |
1980.03.11 |
申请人 |
HITACHI, LTD. |
发明人 |
TANABE, MASANORI;SHIMADA, SATOSHI;YASUKAWA, AKIO;NISHIHARA, MOTOHISA;NAGATA, TAKEO |
分类号 |
G01B7/16;G01L1/18;H01L29/84;(IPC1-7):G01L1/22 |
主分类号 |
G01B7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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