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经营范围
发明名称
EVALUATION FOR SEMICONDUCTOR
摘要
申请公布号
JPS5658655(A)
申请公布日期
1981.05.21
申请号
JP19790135588
申请日期
1979.10.19
申请人
MATSUSHITA ELECTRONICS CORP
发明人
TSUDA NAOYUKI;MIYAI YUKIO
分类号
G01R31/26;G01N27/00;G01N27/22;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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