| 摘要 |
PURPOSE:To make axial alignment accuracy higher by forming guide channels for positioning on the back of pairing semiconductor substrates and providing a common substrate having a projecting part engaging in the channels of these two substrates. CONSTITUTION:The front of a pair of optical fiber OF arraying substrates 4, 4' comprising semiconductor crystal of Si or the like is engraved with respectively plural OF arraying channels 41, 41' and the back thereof with guide channels 42, 42' for positioning. These channels 41, 41' and 42, 42' are precisely formed by a photoetching method or the like in such a manner that they assume predetermined relative positions with respect to the other. The guide channels 42, 42' of the substrates 4, 4' formed in this way are so formed at to commonly engage the protruding part 61 precisely formed to a positioning substrate 6 comprising semiconductor crystal of Si or the like. Thereby, errors in working may be reduced considerably and multiple OFs may be connected at low losses. |
