| 摘要 |
PURPOSE:To raise the accuracy of analysis by a simplified structure in which a plate with plural slits formed inclinationally and in parallel in a row, having different widths, is moved along ion beam path while being inclined. CONSTITUTION:At the lower end of the fine adjusting shaft 13 connected with the screw 29, one slit plate 30 is fastened inclinationally at the angle against the direction Y in such a way that the plural slits 31 of different widths coincide with the longitudinal direction of ion beam, and is moved on the surface of a slit base under the guidance of a pair of the guides 32. Thus, when a micrometer type screw 29 is rotated, the plate 30 is moved, optional slit 31 is situated on the ion beam path by fine adjustment, and the slit 31 is rotated around the slit 31a as the center by turning the inclined fine adjusting knob 18 to finely adjust the inclination of the slit. The said slit is selected according to the magnitude of resolving power. Thus, the accuracy of analysis can be raised. |
