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发明名称
COMPOUND SEMICONDUCTOR PROTECTIVE FILM
摘要
申请公布号
JPS5513958(A)
申请公布日期
1980.01.31
申请号
JP19780087359
申请日期
1978.07.17
申请人
NIPPON ELECTRIC CO
发明人
FUJI TATSUO
分类号
H01L21/473;H01L21/316
主分类号
H01L21/473
代理机构
代理人
主权项
地址
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