METHOD OF FORMING FINE PATTERN,申请号JP19780083141-传众专利搜索

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发明名称	METHOD OF FORMING FINE PATTERN
摘要
申请公布号	JPS559481(A)	申请公布日期	1980.01.23
申请号	JP19780083141	申请日期	1978.07.07
申请人	NIPPON ELECTRIC CO	发明人	EDOKORO SOUTAROU;GOKAN HIROSHI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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