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发明名称
BELADEVORRICHTUNG
摘要
申请公布号
DE69128194(T2)
申请公布日期
1998.03.26
申请号
DE1991628194T
申请日期
1991.02.14
申请人
SURFACE TECHNOLOGY SYSTEMS LTD., NEWPORT, GB
发明人
BRANCHER, CARL, DAVID, MONNINGTON, ABERGAVENNY, GWENT NP7 7AD, GB
分类号
H01L21/677;H01L21/687;(IPC1-7):H01L21/68;B65G49/07
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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