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经营范围
发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54107264(A)
申请公布日期
1979.08.22
申请号
JP19780013554
申请日期
1978.02.10
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
AZUMA MINORU;TSUJI ISAMU
分类号
H01L21/52;H01L21/58
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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