摘要 |
An electrode for use in capacitive pressure transducers of the type including either a single diaphragm electrode and a conductive reference plate separated by a gap or two diaphragm electrodes separated by a gap. The electrode comprises a conductive area having a plurality of nonconductive areas in the conductive area arranged and configured such that the capacitive fringe effects of the nonconductive areas substantially reduces the nonlinear component of the variation in the capacitance of the capacitive pressure transducer as a function of pressure.
|