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发明名称
TEST SYSTEM FOR MONOLITHIC IC
摘要
申请公布号
JPS5460573(A)
申请公布日期
1979.05.16
申请号
JP19770126837
申请日期
1977.10.24
申请人
HITACHI LTD
发明人
INOUE FUMIHITO
分类号
G01R31/28;G01R31/26;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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