Probe for selectively detecting vapors, water vapor in particular

摘要

A probe for selectively detecting a vapor component in a gaseous atmosphere in contact therewith. The probe includes a pair of measuring electrodes and a semiconductor layer which is coated with a dielectric layer. An auxiliary electrode is placed opposite the semiconductor layer so that the voltage can be varied and consequently the level of the average current can be adjusted. It is thereby possible to detect the concentration of a vapor component to be measured in the entire range and with the same sensitivity.