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经营范围
发明名称
ELECTRON BEAM APPARATUS
摘要
申请公布号
GB1514095(A)
申请公布日期
1978.06.14
申请号
GB19760004110
申请日期
1976.02.03
申请人
IBM CORP
发明人
分类号
H01J37/09;H01J37/141;H01J37/147;H01J37/30;H01L21/027;(IPC1-7):H01J29/46
主分类号
H01J37/09
代理机构
代理人
主权项
地址
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