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发明名称
BONDING UNIT
摘要
申请公布号
JPS5352066(A)
申请公布日期
1978.05.12
申请号
JP19760126139
申请日期
1976.10.22
申请人
HITACHI LTD
发明人
TANIGUCHI YUUZOU
分类号
B65G60/00;B65H31/00;H01L21/50;H01L21/52;H01L21/68
主分类号
B65G60/00
代理机构
代理人
主权项
地址
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