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发明名称
SELECTIVE ETCHING OF POLYIMIDE SYSTEM FILM
摘要
申请公布号
JPS5349071(A)
申请公布日期
1978.05.04
申请号
JP19760122768
申请日期
1976.10.15
申请人
HITACHI LTD
发明人
YAMANAKA ICHISUKE;SAIKI ATSUSHI
分类号
C08J7/02;B05D3/10;C08J7/12;H01L21/306
主分类号
C08J7/02
代理机构
代理人
主权项
地址
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