| 摘要 |
PURPOSE: To provide a method for generating process data covering all the feature states in a simple way and in short time. CONSTITUTION: A generating method obtaining pseudo process data from a function or the synthesis of the function, a generating method obtaining pseudo process data by a table interpolation by inputting the centroid value of a feature state and a process data generating method obtaining pseudo process data from plural of process data by a fuzzy inference and using a fuzzy correlation are prepared, one method is selected from these plural methods, and pseudo process data is generated. By the selection of the method by 'function' or 'table interpolation', the operation confirmation/evaluation of a process control block can be performed in a simple way and in short time. By the selection of the method by 'fuzzy correlation', simulation data which is close to actual process data can be obtained. By properly using the methods according to cases, efficient simulations can be performed. |
