METHOD AND UNIT FOR CONTROLLING CONFOCAL MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To pick up images of an object which are as small in number as possible within a range wherein an objective does not collide against the object. SOLUTION: This control method includes a positioning process for performing installation by a moving stage 3 so that the initial position of the interval between the object 1 and objective 2 has the length obtained by summing up the operation distance of the objective 2 and positioning errors of the moving stage 3 and/or an installation jig 14 and a control process for moving the object 1 by the moving stage 3 so that the interval between the object 1 and objective 2 decreases.