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发明名称
SURFACE INSPECTION USING A NON-VIBRATING CONTACT POTENTIAL PROBE
摘要
申请公布号
EP1711801(B1)
申请公布日期
2009.06.17
申请号
EP20040780139
申请日期
2004.08.05
申请人
QCEPT TECHNOLOGIES INC.
发明人
STEELE, M., BRANDON;HAWTHORNE, JEFFREY, ALAN;KIM, CHUNHO;SOWELL, DAVID, C.
分类号
G01N27/00;G01N33/00;G12B21/02;H01L21/66
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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