| 摘要 |
PURPOSE:To improve a product yield against disconnection by arranging so that the winding reel fitted with individual wire is not interferred each other and cutting the ingot of a high brittle material in plural pieces simultaneously, in cutting the ingot in a thin plate shape by a wire saw. CONSTITUTION:Wire W10-W21 are supported so as to align at the specified interval in the position cutting an ingot 1 with being delivered from the winding reel 10b-21b at the start end side and a thin wall water is cut out of the ingot 1 with a work liquid 34 inclusive of abrasive grain being injected from a nozzle 3 while winding the wire W10-W21 with the driving source connected to the winding reel 10b-21b or 10e-21e at the start end side or terminal side being opened. In the case of which of the wire W10-W21 being disconnected while under cutting, the wafer with which a disconnected wire is brought into contact only is damaged and no problem is caused on other wafers. |
