| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow detecting element excellent in responsiveness. SOLUTION: An insulating support film is formed on the surface of a tabular substrate, multiple heating resistors 4, 5 made of a heat-sensitive resistance film are formed on the support film, an insulating protective film is formed on the heat-sensitive resistance film, and the tabular substrate below a heat- sensitive resistance film region is partially removed to form a diaphragm. Multiple heating resistors 4, 5 are aligned in the flow direction of a measured fluid, and the flow is measured, based on the quantity corresponding to the difference of the heating current between the heating resistor 4 on the upstream side and the heating resistor 5 on the downstream side in this heat-sensitive flow detecting element. A gap of a prescribed distance in the flow direction is provided between the heating resistor 4 on the upstream side and the heating resistor 5 on the downstream side.</p> |
