发明名称 MANUFACTURING METHOD AND APPARATUS FOR LAGRE-AREA THIN FILM
摘要 The present invention relates to a method for manufacturing a thin film, and more particularly, to a method for manufacturing an large-area thin film to improve uniformity of a thin film which is manufactured through a scheme of manufacturing a thin film based on a solution process. The method includes a step of forming a thin film on one surface of a substrate through a solution process as one process, and a step of treating a coated surface with a uniform air pressure after performing solution coating. According to the present invention, the large-area uniform coating with significantly high precision is easily performed based on a roll-to-roll process, so an organic electronic device based on the solution process may be manufactured to have high quality equivalent to that of an organic electronic device manufactured in a vapor deposition scheme. In addition, the present invention provides an innovative method that may change the base of the process of manufacturing an organic electronic device through the solution process and may be a core technique which can commercialize the solution process organic electronic device.
申请公布号 KR20160069799(A) 申请公布日期 2016.06.17
申请号 KR20140175870 申请日期 2014.12.09
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 YANG, MIN YANG;SEOK, JAE YOUNG
分类号 H01L51/56 主分类号 H01L51/56
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