| 摘要 |
A sensing electrode (24, 26) on a glass layer (14, 16) of an anodically-bonded capacitive sensor (10) has an interfacial barrier film (46) containing a nitride compound between the electrode (24, 26) and the glass layer (14, 16). In one embodiment, the capacitive sensor (10) is an inertial sensor having a sensing element (20) hingedly mounted to a frame (18) which is anodically bonded to the glass layer (14, 16). The sensing electrode (24, 26) is then located on a surface of the glass layer (14, 16) facing the sensing element (20). The sensing element (20) and the frame (18) are preferably made of silicon and the interfacial film (46) is preferably silicon nitride. |
