METHOD FOR MANUFACTURING ELECTRONIC DEVICE WITH PIEZOELECTRIC MATERIAL LAYER DEPOSITED ON METALLIC LAYER

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a piezoelectric film used for a resonator device. SOLUTION: In the method of this invention, a texture of a piezoelectric film 120 is directly affected by the surface condition of an electrode layer 135 thereunder and the surface condition of the electrode layer 135 is affected by the surface condition of an oxide layer or plug stack 125 under the electrode layer 135. Thus, the method of this invention is for manufacturing a device including the piezoelectric film and is characterized in that the method includes a step where the surface roughness and the deposition of the electrode are controlled.