发明名称 PZT microactuator processing
摘要 PZT crystals are peripherally coated in manufacture by cutting a series of intersecting first kerfs in a wafer comprising a plurality of PZT crystal precursors, filling the kerfs with a coating resin, and cutting a second, narrower kerf in the locus of the first kerfs to separate the crystals while providing them a peripheral coating of the coating resin.
申请公布号 US6393681(B1) 申请公布日期 2002.05.28
申请号 US20010772354 申请日期 2001.01.29
申请人 MAGNECOMP CORP. 发明人 SUMMERS ROBERT
分类号 H04R17/00;(IPC1-7):H04R17/00 主分类号 H04R17/00
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