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发明名称
FORMATION OF METALLIC PROJECTION AND ITS TRANSCRIPTION METHOD
摘要
申请公布号
JPH0429323(A)
申请公布日期
1992.01.31
申请号
JP19900135066
申请日期
1990.05.24
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KAWAKITA TETSUO;HATADA KENZO
分类号
H01L21/60;H01L21/321
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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