发明名称 IMPROVEMENTS IN OR RELATING TO THE FORMATION OF MASKS ON SUBSTRATES
摘要 <p>1287031 Photographic reversal process; photomasks INTERNATIONAL BUSINESS MACHINES CORP 8 Jan 1970 [10 Jan 1969] 1044/70 Headings G2C and G2M Photo-masks are prepared on a substrate coated with a photographic gelatino silver halide emulsion by (1) exposing, (2) developing the exposed areas (3) removing the visible image formed (bleaching), and (4) heating to above 250‹C. to remove the coating in the exposed areas. The non-exposed coating may be rendered visible between steps (3) and (4) by exposure and development or by treatment with a reducing agent. The mask formed may be covered with a layer of metal (e.g. G), the metal overlying the remaining emulsion removed (e.g. with aqueous hypochlorite), and the remaining emulsion removed (e.g. with HNO 3 ) leaving a metal mask.</p>
申请公布号 GB1287031(A) 申请公布日期 1972.08.31
申请号 GB19700001044 申请日期 1970.01.08
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人
分类号 G03C5/00;G03C5/40;G03F1/54;H01L21/306;H01L21/3213;H05K3/00 主分类号 G03C5/00
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