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发明名称
EPITAXIAL VAPOR GROWTH METHOD
摘要
申请公布号
JPH0234594(A)
申请公布日期
1990.02.05
申请号
JP19880187196
申请日期
1988.07.26
申请人
FUJITSU LTD
发明人
EBE KOJI;NISHIJIMA YOSHITO
分类号
C30B23/02;H01L21/203
主分类号
C30B23/02
代理机构
代理人
主权项
地址
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