| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow sensor that ensures a sufficient sensor sensitivity and is designed not to be exposed to a fluid at a part of the flow sensor.SOLUTION: The flow sensor includes: an insulation structure part 3 in a side of a sensor substrate 2; thermo-piles 6a and 6b for the insulation structure part 3; and a lid substrate 8 and a joint material 7 sealing at least the insulation structure part 3. The space between the temperature-sensitive point of the thermo-pile 6a (6b) and the lid substrate 8 and the joint material 7 is thermally set in a practically short-circuit state.SELECTED DRAWING: Figure 1 |
