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发明名称
HEAT TREATMENT DEVICE
摘要
申请公布号
JPH04155822(A)
申请公布日期
1992.05.28
申请号
JP19900280523
申请日期
1990.10.18
申请人
TOKYO ELECTRON SAGAMI LTD
发明人
NAKAO MASARU
分类号
C23C16/44;F27B17/00;F27D11/02;H01L21/205;H01L21/22;H01L21/31;H01L21/324;H05B3/66
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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