| 摘要 |
<p>A cerium oxide slurry for polishing comprising cerium oxide dispersed in water, wherein the slurry has a conductivity of 30c.νS/cm or less when the cerium oxide concentration in the slurry is c wt.%. In order to adjust the conductivity to 30c.νS/cm or less, cerium oxide is washed with deionized water.</p> |
